MEMS Foundry Service - Photolithography Mask Plate, short for mask, is the pattern master used in photolithography, a common micro-nano fabrication process. An opaque light-shielding film forms mask patterns on a transparent substrate to transfer graphic information onto product substrates. Meiming Electronics supplies mask plates including quartz substrates, soda-lime glass substrates, quartz plates and film masks.
Process Introduction
MEMS Foundry Service - Photolithography Mask Plate, short for mask, is the pattern master used in photolithography, a common micro-nano fabrication process. An opaque light-shielding film forms mask patterns on a transparent substrate to transfer graphic information onto product substrates. Meiming Electronics supplies mask plates including quartz substrates, soda-lime glass substrates, quartz plates and film masks.
Technical Applications
Masks are widely adopted in all fields involving photolithography processes, such as IC, FPD, PCB and MEMS.
Process Capacity
Customizable size: 2.5 inch – 9 inch
Soda-lime mask precision: ±3um
Quartz mask precision: ±0.1um
